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Finished projects
Leybold Z 590 ( Sputter-center for production )
Features
During renovation work at customer site Kuhnke-PLC 653-W was replaced by a Simatic PLC S7-300. Visualization and process data management is done via a PC with a 19 "TFT- monitor. Relevant process data are recorded in an Excel file (Data logging). Furthermore, the complete vacuum measurement was re-equipped with gauges from Pfeiffer company. Built into the system water distribution was for better accessibility outsourced and located on a wall behind the plant. The pneumatic valve island has also been revamped.
Sputter-down system, 4 cathodes PK 200 ( dia. 200mm ).
Semi-automatic, single-substrate load-lock.
Substrate carrier with 4 substrate positions. Deposition mode static, dynamic or with oscillation.
Sputter mode RF/DC, with or without RF-Bias.
RF-etching.
Presputter-shutter available in different models.
Microprocessor-controlled. 40 Recipies can be stored from 69 programmable layer-types.
19"-TFT for visualization.
Pumping system: D40B and TMP 1000, loadlock D8B.
Pictures Leybold Z590 - water distribution
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